- COMPONENTS
- Vacuum Pumps
- Dry Pumps
- Screw Type Dry Vacuum Pump LS Series 120A
- Screw Type Dry Vacuum Pump LS Series LS300A
- Screw Type Dry Vacuum Pump LS Series LS 600A
- Screw Type Dry Vacuum Pump LS Series LS 1200A
- Dry Vacuum Pump MS Series
- Scroll Type Dry Vacuum Pumps DIS Series
- Scroll Type Dry Vacuum Pumps DISL Series
- Diaphragm Type Dry Vacuum Pump DTC Series
- Diaphragm Type Dry Vacuum Pump DAU-20/DTU-20
- Diaphragm Type Dry Vacuum Pump DA Series
- Diaphragm Type Dry Vacuum Pump DAP Series
- Dry Vacuum Pump CR Series
- Dry Vacuum Pump LR/HR/UR Series
- Dry Vacuum Pump CR Series Version B
- Dry Vacuum Pump GR Series
- Rocking Piston Type Dry Vacuum Pumps DOP Series
- Oil Rotary Pumps
- Mechanical Booster Pumps
- Ion Pumps
- Turbo Molecular Pumps
- Oil Diffusion Pumps
- Cryo Pumps
- Accessories
- Dry Pumps
- Vacuum Gauges
- G-TRAN Series Pressure Switch Unit (SAU)
- Ceramic Capacitance Manometer, CCMT-D Series
- Extreme High Vacuum Gauge AxTRAN
- G-TRAN Series Pirani Gauge Sensor Unit SP1
- Pirani Vacuum Gauge Transducer Type SW100 SW100-A / R
- G-TRAN Series 4CH Display Unit IM1R1, IM2R1
- Cold Cathode Gauge Sensor Unit G-Tran Series SC1
- Multi Ionization Gauge G-TRAN Series ST2-1, ST2-2
- Smartphone-Direct Pirani Gauge SWU10-U
- Process Gas Monitor
- Leak Detectors
- Thin Film Measurement / Deposition Controller
- Vacuum Valves
- Power Generator
- Thermo Electric Evaluation
- Vacuum Pumps
- Equipment
- By technology
- By application
- Advanced Packaging Device
- Architectural Glass
- Automobile Parts
- Automotive
- Aviation – Airplane Parts
- Air Conditioning and Refrigeration (ACR)
- Decorative Coating
- Electronic Materials
- EMI Shielding
- Food & Medicine
- Food Processing
- Health Care
- Functional Materials
- Display
- LED Device
- Magnetic Device
- Magnet Materials
- MEMS Device
- OLED
- Optical Film
- Pharmaceutical
- Photovoltaic
- Power Device
- Medium Current Ion Implanter SOPHI-400
- Activation Annealing System Ailesic-2000
- Oxidation-Nitridization-Annealing System Ailesic 1400-1700
- High-temp Ion Implanter for SiC IH-860PSIC
- Medium Current Ion Implanter SOPHI-200/260
- Dry Etching System for Production NE-5700 & NE-7800
- Load-lock-type Plasma CVD System CC-200/400 PD
- Back Side Metallization Sputtering System SRH-530 pd
- R&D Equipment for Displays
- Semiconductor Process (FEOL/BEOL)
- Semiconductor Process (Non Volatile Memory)
- Thin Film Deposition
- Thin Film Battery
- Touch Panel
Sputtering Targets
To develop and produce high quality sputtering targets, ULVAC carefully evaluates which manufacturing method to use for each material to meet the product quality goals “Low particle” “Good film uniformity” “High usage efficiency”.
- Ultrasonic defect testers ensure meticulous quality assurance
- High-reliability metal bonding technology
- Low-particle targets
- Sputtering targets made using optimum manufacturing methods
- Low-particle targets
- Attaining high uniformity by adjusting the metal microstructure
- Sputtering targets support for all fields including TFT and OLED
- High-reliability metal bonding technology
- Attaining high uniformity by adjusting the metal microstructure