Sputtering Targets
To develop and produce high quality sputtering targets, ULVAC carefully evaluates which manufacturing method to use for each material to meet the product quality goals “Low particle” “Good film uniformity” “High usage efficiency”.
- Ultrasonic defect testers ensure meticulous quality assurance
- High-reliability metal bonding technology
- Low-particle targets
- Sputtering targets made using optimum manufacturing methods
- Low-particle targets
- Attaining high uniformity by adjusting the metal microstructure
- Sputtering targets support for all fields including TFT and OLED
- High-reliability metal bonding technology
- Attaining high uniformity by adjusting the metal microstructure





