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Oil Diffusion Vacuum Pumps – Maximum Performance for Your Vacuum System

Our oil diffusion vacuum pumps provide a reliable and efficient solution for anyone requiring the highest vacuum quality. With decades of experience in vacuum technology, ULVAC is a leader in the development of advanced vacuum solutions. Our oil diffusion pumps are ideal for a wide range of industries and applications where high performance and precision are essential.

Oil Diffusion Ejector Vacuum Pump PBL Series
Oil Diffusion Ejector Vacuum Pump PBL Series
  • Pumping Speed (L/sec): 80 – 7000
Oil Diffusion Vacuum Pump PFL Series
Oil Diffusion Vacuum Pump PFL Series
  • Pumping Speed (L/sec): 10000 – 70000
Oil Diffusion Vacuum Pump ULK Series
Oil Diffusion Vacuum Pump ULK Series
  • Pumping Speed (L/sec): 550 – 4900

Industries that Benefit from Oil Diffusion Pumps

Oil diffusion vacuum pumps are used in numerous industries and are particularly well suited for applications requiring extremely high vacuum conditions. Key sectors include:

  • Metallurgy: Vacuum coating, heat treatment, thin-film technologies
  • Chemical Industry: Production of specialty gases and chemicals under vacuum conditions
  • Research and Development: Highly precise vacuum environments for experiments and testing
  • Electronics Industry: Manufacturing of semiconductors and displays
  • Medical Technologies: Sterilization processes and vacuum packaging

Applications and Use Cases

Our oil diffusion pumps deliver excellent performance in various fields that depend on ultra-high vacuum conditions:

  • Thin-Film Coating: Coating substrates with metals or other materials
  • Sputtering Technology: Surface coating and decorative applications
  • Microelectronics: Vacuum conditions required for producing semiconductors and optical devices
  • Analytical Instruments: High-vacuum environments for analyzing gases and other materials

Thanks to their ability to generate vacuum quickly and efficiently, our pumps are indispensable in processes requiring a precise and controlled vacuum environment.

Advantages of Our Oil Diffusion Pumps

  • High Pumping Speed and Efficiency: Innovative jet technology enables rapid and efficient handling of gas flows, making these pumps ideal for high-volume applications.
  • Durability and Robustness: Designed for continuous operation, our pumps offer long service life with minimal maintenance requirements.
  • High Reliability: With no moving parts, the pumps are extremely robust and dependable.
  • Energy Efficiency: Advanced heating systems minimize energy consumption while maximizing performance.
  • Compact Design: Our models are engineered for easy integration into a wide variety of system configurations without unnecessary space requirements.

General Information on Oil Diffusion Vacuum Pumps

Operating Principle

Oil diffusion vacuum pumps use a special oil that is vaporized by a heating system. The vapor is then directed through the pump, where it captures and transports gas molecules out of the vacuum chamber. This process enables the generation of a highly pure vacuum required for many industrial and scientific applications.rs.

Areas of Use

Oil diffusion pumps are particularly effective in applications requiring very low pressures (below 10⁻⁶ Torr). They are the preferred choice for semiconductor manufacturing, thin-film technology, and other high-tech processes where superior vacuum quality is critical.

Contact Us for Your Customized Solution

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