DC Power Generator DPG-10/DPG-20
The DPG-10/DPG-20 are 10kW/20kW DC power generators for sputtering. They are made of reliable components and circuits. These highly reliable power generators have been optimized for plasma loads with a design that reflects our many years of knowledge that includes power generator applications.
Light-weight and space-saving design with excellent installation flexibility.
- Selectable output voltage range
We feature a lineup with 800V specification in addition to 1000V specification.
- Extensive arc handling
Extensive arc control methods familiar with plasma.
- Requires no cooling water
Forced air cooling, requires no cooling water.
- Can be equipped with a high-speed arc shutoff circuit
Achieves low arc energy as standard. Can also be equipped with a high-speed arc shutoff circuit as an option.
- Can be equipped with a flexible parallel operation function
DPG-10, DPG-20: With the optional parallel operation function, 10kW and 20kW can be combined to allow up to 12units to work together in
parallel operation. (240kW max)
SPECIAL FEATURES / FURTHER APPLICATIONS
- Flat panel display sputtering
- Semiconductor sputtering
- Touch panel sputtering
- Industrial coating sputtering