Oil-Sealed Rotary Vane Vacuum Pumps from ULVAC
Oil-sealed (oil-lubricated) rotary vane vacuum pumps are versatile, reliable vacuum solutions for industrial processes, research & development, and analytical applications. Operating on the proven rotary vane principle, they use oil as both sealing and lubricating medium to deliver stable, high vacuum in the rough and fine vacuum ranges. ULVAC offers a broad portfolio of oil-sealed rotary vane pumps in various capacities—from compact laboratory units to large industrial pumps.
These pumps are distinguished by high manufacturing quality, robustness and long service life, with proven performance across countless applications worldwide. Depending on the model, they are single-stage or two-stage and achieve ultimate pressures down into the 10⁻³ mbar range. With pumping speeds from approx. 1.8 to 750 m³/h, ULVAC rotary vane pumps cover virtually all requirements in the low and medium vacuum ranges. For enhanced system performance they can be easily combined with mechanical booster pumps to achieve higher throughput, shorter evacuation times and lower ultimate pressures.
- Pumping speed: 3-36 L/min
- Pressure level: 0.67 Pa
- Pumping speed: 135 – 162 L/min
- Pressure level: 5.0 x 10‐¹
- Oil leak-free power transfer section
- Pumping speed: 200 – 240 L/min
- Pressure level: 5.0 x 10‐¹
- Oil leak-free power transfer section
- Low vibration and noise
- International standard (multi-voltage motor)
- Pumping speed: 30 – 108 m³/hr
- Pressure level: 6.7 x 10 mbar
- Pumping speed: 14.4 – 108 m³/h
- Pressure level: 0.67 – 2.0
- Pumping speed: 150 – 288 m³/hr
- Pressure level: 5.3 x 10 m² mbar
- Smallest footprint in the class
- IE3 high-efficiency multi-voltage motor installed
- Built-in oil mist separator
- Pumping speed: from 650 to 750 m3/h
- Pumping speed: 150 – 288 m³/hr
- Pressure level: 5.3 x 10 m² mbar
- Pumping speed: 9-22 m³/b designed
- pressure level: 0,67 Pa
- Motor Voltage: 200-220
ULVAC product overview
Below is our product range of oil-sealed rotary vane vacuum pumps. ULVAC provides the right solution for every application—from small, portable models for lab and development use to high-performance industrial pumps. Each series offers specific advantages such as low vibration and noise, magnetic couplings to eliminate oil leakage, or integrated oil mist separators. Please refer to the individual product pages for detailed technical data:
Note: The optimum pump selection depends on your process requirements (required pumping speed, ultimate pressure, handled gases, etc.). We are happy to advise—just get in touch.
Industries
Oil-sealed and oil-lubricated rotary vane vacuum pumps are used across a wide range of industries. Their flexibility, performance and moderate capital cost make them a first choice for diverse industrial and scientific fields:
- Semiconductors: Precise vacuum conditions for etching, coating and lithography.
- Pharmaceuticals: Efficient evacuation of reactors and dryers under controlled conditions.
- Chemical processing: Extraction of vapours and gases; stabilising vacuum levels in chemical processes.
- Materials & Coating: Stable vacuum for plasma etch, PVD/CVD and thin-film technologies.
- Medical technology & laboratories: Precise vacuum control for filtration, sterilisation and analysis.
- Food industry: Vacuum packaging to extend shelf life and product quality.
- Heat treatment & metallurgy: Oxygen-free environments in vacuum furnaces and metallurgical processes.
Applications
- Vacuum packaging: High vacuum levels for extended shelf life and quality.
- Plasma etching & surface treatment: Precise chamber control in microelectronics.
- Vacuum distillation & filtration: Gentle separation and filtration at reduced pressure.
- Chamber & system evacuation: Rapid, safe pump-down from atmospheric pressure in production systems.
- Vacuum drying: Gentle drying in food, pharma and chemical industries.
- Thin-film deposition: Uniform coatings for semiconductors, solar cells and optics.
- Service & maintenance: Mobile or stationary evacuation, leak testing and recommissioning.
Advantages of ULVAC rotary vane pumps
- High ultimate vacuum: Two-stage models reach down to 10⁻³ mbar; single-stage down to 10⁻² mbar.
- Wide pumping-speed range: From < 2 m³/h to > 700 m³/h—ideal from lab to large-scale industry, from R&D to mass production.
- Robust & long-lived: Engineered for continuous operation under demanding conditions.
- Innovative technology: Magnetic couplings, oil separation systems, energy-efficient IE3 motors.
- Quiet operation: Minimal vibration and low noise—suitable for sensitive environments.
- High compatibility: Extensive accessories and global standards compliance (CE, cTUVus, etc.).
- Easy maintenance: Good service access, straightforward oil changes, spare-parts availability, and ULVOIL lubricants for optimised performance.
General technical information
| Configuration | Nominal pumping speed | Typical ultimate pressure | Typical application range |
| Single-stage | up to > 700 m³/h | ~10⁻² – 10⁰ mbar | Rough vacuum, packaging, industrial systems |
| Two-stage | up to approx. 90 m³/h | ~10⁻³ – 10⁻² mbar | Fine vacuum, lab, coating, research |
Contact & advice
Would you like to learn more about our oil-sealed rotary vane vacuum pumps or choose the right pump for your application? Contact us—we’ll be happy to help.
Kontaktieren Sie uns – wir beraten Sie gern!
Get in touch now:
Use our contact form or call +49 89 960909-0 to speak directly with a ULVAC expert.
Discover the advantages of ULVAC rotary vane vacuum pumps—reliable, efficient and tailored to your needs.
