Products

 •    Products  •    Components  •    Vacuum Pumps

ULVAC Vacuum Pumps for Industrial Requirements

High-Performance Vacuum Pumps for Industry, Research, and Production

Vacuum pumps are an essential part of modern industrial and research processes. They enable drying, coating, analysis, packaging, and many other applications. ULVAC offers a broad portfolio of vacuum pumps—from oil-sealed solutions to dry high-performance pumps—covering the needs of a wide range of industries.

Dry Pumps
Oil Rotary Pumps
Mechanical Booster Pumps
Ion Pumps
Turbo Molecular Pumps
Oil Diffusion Pumps
Cryo Pumps
Accessories

Which industries use ULVAC vacuum pumps?

Semiconductor and Electronics Manufacturing

Whether in lithography, sputtering, CVD, or PVD—vacuum technology is at the heart of semiconductor production. ULVAC vacuum pumps ensure stable process conditions and thus contribute to the high quality of modern electronic components.

Chemical and Pharmaceutical Industries

The chemical and pharmaceutical sectors require reliable and often corrosion-resistant pumps. Applications such as vacuum drying, freeze drying (lyophilization), and process gas handling are optimally supported by ULVAC’s oil-sealed and dry pump technologies.

Research, Analytics, and Life Sciences

Research institutes and laboratories rely on precise and clean vacuum technology. ULVAC scroll and diaphragm pumps offer oil-free operation, low maintenance, and are ideal for analytical instruments and scientific experiments.

Food and Packaging Industry

From vacuum packaging to food preservation: vacuum pumps are a key component of the food industry. ULVAC supplies robust, high-performance solutions for continuous operation in demanding production environments.

General Industrial Applications

In metal processing, coating technology, or vacuum furnaces, ULVAC pumps ensure stable processes. Thanks to a wide range of oil-lubricated and dry pump types, the right solution exists for every industrial application.

Typical Applications of ULVAC Vacuum Pumps

Vacuum Drying and Freeze Drying

In drying technology, constant vacuum conditions are essential. ULVAC screw and diaphragm pumps deliver reliable results with high energy efficiency.

Coating and Surface Treatment

PVD, CVD, ion plating, and other coating processes require high and stable vacuum levels. ULVAC turbomolecular pumps and oil diffusion pumps are specifically designed for these demands.

Analytics and Laboratory Applications

Oil-free scroll and diaphragm pumps ensure a clean environment for sensitive analytical instruments. They operate quietly, require little maintenance, and are ideal for research, spectroscopy, and mass spectrometry.

Industrial High-Throughput Processes

For applications demanding high stability and speed, dry screw pumps and high-performance Roots pumps are used. They offer long service life and high operational reliability.

The Right Vacuum Pump for Every Requirement

ULVAC offers a wide selection of pump types, each optimized for specific applications:

  • Cryopump – for high and ultra-high vacuum in research and semiconductor manufacturing
  • Roots Pump (Roots Blower) – booster pump with high pumping speed, ideal in combination with backing pumps for low-pressure ranges
  • Oil Diffusion Pump – proven solution for high-vacuum processes, still widely used in coating and analytical applications
  • Oil-Sealed Rotary Vane Vacuum Pump – robust all-rounders for laboratory and industrial use
  • Rotary Piston Vacuum Pump – two- or three-lobe piston design, available as dry or oil-sealed, often used for medium vacuum ranges
  • Oil-Sealed Vacuum Pumps – classic vacuum technology for numerous industrial applications
  • Diaphragm Vacuum Pump – oil-free, quiet, and low-maintenance for laboratory and analytical equipment
  • Screw Vacuum Pump – dry, energy-efficient solution for universal industrial applications
  • Scroll Vacuum Pump – oil-free, quiet, and reliable; ideal for research and analytics
  • Turbomolecular Pump – high vacuum for precision processes in high-tech industries

Vacuum Pump Accessories and Components

  • Vacuum Pump Oil – optimal lubrication and protection for extended pump lifetime
  • Vacuum Valves – safe control and protection of complete vacuum systems

Find the Right Vacuum Pump for Your Application

Whether semiconductor manufacturing, pharmaceuticals, research, or general industry—ULVAC offers the right solution for every requirement. Our experts are happy to advise you in selecting the ideal vacuum pump and support you in integrating it into your processes.