- COMPONENTS
- Vacuum Pumps
- Dry Pumps
- Screw Type Dry Vacuum Pump LS Series 120A
- Dry Vacuum Pump MS Series
- Scroll Type Dry Vacuum Pumps DIS Series
- Scroll Type Dry Vacuum Pumps DISL Series
- Diaphragm Type Dry Vacuum Pump DTC Series
- Diaphragm Type Dry Vacuum Pump DAU-20/DTU-20
- Diaphragm Type Dry Vacuum Pump DA Series
- Diaphragm Type Dry Vacuum Pump DAP Series
- Dry Vacuum Pump CR Series
- Dry Vacuum Pump LR/HR/UR Series
- Dry Vacuum Pump CR Series Version B
- Dry Vacuum Pump GR Series
- Rocking Piston Type Dry Vacuum Pumps DOP Series
- Oil Rotary Pumps
- Mechanical Booster Pumps
- Ion Pumps
- Turbo Molecular Pumps
- Oil Diffusion Pumps
- Cryo Pumps
- Accessories
- Dry Pumps
- Vacuum Gauges
- G-TRAN Series Pressure Switch Unit (SAU)
- Ceramic Capacitance Manometer, CCMT-D Series
- Extreme High Vacuum Gauge AxTRAN
- G-TRAN Series Pirani Gauge Sensor Unit SP1
- Pirani Vacuum Gauge Transducer Type SW100 SW100-A / R
- G-TRAN Series 4CH Display Unit IM1R1, IM2R1
- Cold Cathode Gauge Sensor Unit G-Tran Series SC1
- Multi Ionization Gauge G-TRAN Series ST2-1, ST2-2
- Smartphone-Direct Pirani Gauge SWU10-U
- Process Gas Monitor
- Leak Detectors
- Thin Film Measurement / Deposition Controller
- Vacuum Valves
- Power Generator
- Thermo Electric Evaluation
- Vacuum Pumps
- Equipment
- By technology
- By application
- Advanced Packaging Device
- Architectural Glass
- Automobile Parts
- Automotive
- Aviation – Airplane Parts
- Air Conditioning and Refrigeration (ACR)
- Decorative Coating
- Electronic Materials
- EMI Shielding
- Food & Medicine
- Food Processing
- Health Care
- Functional Materials
- Display
- LED Device
- Magnetic Device
- Magnet Materials
- MEMS Device
- OLED
- Optical Film
- Pharmaceutical
- Photovoltaic
- Power Device
- Medium Current Ion Implanter SOPHI-400
- Activation Annealing System Ailesic-2000
- Oxidation-Nitridization-Annealing System Ailesic 1400-1700
- High-temp Ion Implanter for SiC IH-860PSIC
- Medium Current Ion Implanter SOPHI-200/260
- Dry Etching System for Production NE-5700 & NE-7800
- Load-lock-type Plasma CVD System CC-200/400 PD
- Back Side Metallization Sputtering System SRH-530 pd
- R&D Equipment for Displays
- Semiconductor Process (FEOL/BEOL)
- Semiconductor Process (Non Volatile Memory)
- Thin Film Deposition
- Thin Film Battery
- Touch Panel
ULVAC Crystal Oscillation type Deposition Controller have been developed based on rich experience and technology as a device manufacturer. It is possible to use from the single layer film to the multilayer film for a wide deposition control. ULVAC deposition controllers of the CRTM-Series ensure low rate deposition and high precision film thickness control with an outstanding film thickness/rate resolution. The high speed sampling ratre makes the control highly reponsive. Sensors of the CRTS-Series can be chosen from single-sensors or multi-sensors. Furthermore, the selection depends on deposition condition such as with or without baking, temperature range, etc.. ULVAC’s quartz crystals ensure the smallest frequency change due to radiant heat. ULVAC developped the world-first high performance 4MHz quartz crystal specialzed for organic material film. UCR comes in a carousel type case with 10 pieces/pack for an easy and saftey package. ULVAC is always striving for innovation as a result of long time experience. Just have a look at our latest new product introduction, the CRTM-R1 deposition controller.