Model: uGmni-200-300S

Name: ULVAC GmbH
Address: Kirchheim bei München, München, 85551, DE
Telephone: +49-89-96 0909 0

Flexible configuration of up to six process chambers, depending on the core shape, enables this multi-chamber sputtering system to support a wide range of applications, including power devices, opto-devices, and RF devices.

Features

Features

Compatible with various applications
Substrate size: Up to Φ300mm

APPLICATIONS

Power device: seed and metal layer sputtering
MEMS sensor: PZT sputtering and etching
Optical device: VCSEL etching
Packaging: Descum ashing
Communication device: PE-CVD of insulated film and etching

	Klausnerring 4 85551 Kirchheim b. München Germany
	+49-89-96 0909 0
	inquiries@ulvac.de
	www.ulvac.eu

Model: uGmni-200-300S

Features

APPLICATIONS

Any questions?