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•
Products
•
Equipment
• By Application
COMPONENTS
Vacuum Pumps
Dry Pumps
Screw Type Dry Vacuum Pump LS Series 120A
Dry Vacuum Pump MS Series
Scroll Type Dry Vacuum Pumps DIS Series
Scroll Type Dry Vacuum Pumps DISL Series
Diaphragm Type Dry Vacuum Pump DTC Series
Diaphragm Type Dry Vacuum Pump DAU-20/DTU-20
Diaphragm Type Dry Vacuum Pump DA Series
Diaphragm Type Dry Vacuum Pump DAP Series
Dry Vacuum Pump CR Series
Dry Vacuum Pump LR/HR/UR Series
Dry Vacuum Pump CR Series Version B
Dry Vacuum Pump GR Series
Rocking Piston Type Dry Vacuum Pumps DOP Series
Oil Rotary Pumps
Oil Sealed Rotary Vacuum Pump GHD-031
Oil Sealed Rotary Vacuum Pump GLD Series
Oil Rotary Vacuum Pump VD-Series
Oil Rotary Vacuum Pump VD-Series 901
Oil Rotary Vacuum Pump VS1501, VS2401
Oil Rotary Vacuum Pump PKS Series
Oil-sealed Rotary Vacuum Pump PVD Series
Oil Rotary Vacuum Pump VS650A
Mechanical Booster Pumps
Mechanical Booster Pump PRC Series
Mechanical Booster Pump PMB Series D
Ion Pumps
Acter Pump PST Series
Acter Pump PST-400CXII/PST-400AXII
Acter Pump PST-200CXII/PST-200AXII
Acter Pump PST-100CX/PST-100AX
Acter Pump PST-050CU/PST-050AU
Acter Pump PST-030CU/PST-030AU
Turbo Molecular Pumps
Turbo Molecular Pumping System Desktop YTP
Turbo Molecular Pump UTM-FH, FW Series
Turbo Molecular Pump UTM Series
Oil Diffusion Pumps
Oil Diffusion Ejector Vacuum Pump PBL Series
Oil Diffusion Vacuum Pump PFL Series
Oil Diffusion Vacuum Pump ULK Series
Cryo Pumps
Accessories
Oil SMR-100
Oil Mist Trap OMT Series
Oil for Vacuum Pumps ULVOIL R Series/Super R Series
Oil Mist Trap TM/TMX Series
Vacuum Gauges
G-TRAN Series Pressure Switch Unit (SAU)
Ceramic Capacitance Manometer, CCMT-D Series
Extreme High Vacuum Gauge AxTRAN
G-TRAN Series Pirani Gauge Sensor Unit SP1
Atmospheric Pirani Gauge Combo SW1 & ISG1
G-TRAN Series 4CH Display Unit IM1R1, IM2R1
Cold Cathode Gauge Sensor Unit G-Tran Series SC1
Multi Ionization Gauge G-TRAN Series ST2-1, ST2-2
Smartphone-Direct Pirani Gauge SWU10-U
Process Gas Monitor
Qulee Series Option
Compact Process Gas Monitor – Qulee CGM Series
Basis Process Gas Monitor – Qulee BGM Series
Reactive Process Gas Monitoring System – Qulee RGM Series
High Performance Process Gas Monitor – Qulee HGM Series
Leak Detectors
HELIOT 700 Series
HELIOT 900 Series
Thin Film Measurement / Deposition Controller
Spectroscopic Elllipsometer
High-speed Spectroscopic Ellipsometer UNECS Series
Deposition Controller
Vacuum Valves
Vacuum Valve Series
Power Generator
ECO Shock Series ES10
ECO Shock Series ES4A
DC Power generator DPG-10/DPG-20
DC Power Generator DPG-30 R
Pulsed DC Power generators DPG-5P/DPG-10P
Molecular Interaction Analyzer
Affinix Q8
Thermal Analysis
Mini-PEM
ZEM-3
Infrared Gold Image Furnace RHL-E series
Mini Lamp Annealer MILA 5050
Mini Lamp Annealer MILA 5000
ZEM-5
Equipment
By technology
Sputtering
Magnetic Multi-Layer System Magest S200
Load-lock-type Sputtering System CS-200
Back Side Metallization Sputtering System SRH-530
Cluster-type Sputtering System SME-200
Load-lock-type Sputtering System SDH-4550L
PE-CVD
Expanding Thermal Plasma CVD System ULGLAZE Series
Cluster-type PE-CVD System CME-Series
Load-lock-type Plasma CVD System CC-200/400
Vacuum Evaporation
Batch-type High Vacuum Evaporation System ei-Series
Load-Lock-type High Vacuum Evaporation System CV-Series
Organic/ Inorganic Compound Deposition System VEP-Series
Organic EL Manufacturing Systems SOLCIET, SATELLA & NEW-ZELDA
Ashing
Resist Strip System ENVIRO™ Optima
Advanced Plasma Resist Strip System ENVIRO-1Xa
Plasma-Etching
A Batch System to Remove Native Oxide RISE-300
Dry Etching System for MEMS production NLD-5700
Dry Etching System for Production NE-5700 & NE-7800
Dry Etching Tool APIOS NE-950EX
High-Density Plasma Etching System NE-550
Ion Implantation
Medium Current Ion Implanter SOPHI-400
High-temp Ion Implanter for SiC IH-860PSIC
Medium Current Ion Implanter-SOPHI 200/260
Annealing and Oxidation
Activation Annealing System Ailesic-2000
Oxidation-Nitridization-Annealing System Ailesic 1400-1700
Heat Treatment
Vertical-type Vacuum Heat Treatment Furnace FHV-Series
Vacuum Induction Melting Furnace FMI-Series
Roller-type Vacuum Heat Treatment Furnace FHHn-Series
Batch-type Vacuum Heat Treatment Furnace FHB-60C
Vacuum brazing furnace FB- & FBC-Series
Roll Coaters
Evaporation Roll Coater EW-Series
Freeze Drying / Vacuum Drying
Compact Freeze Drying System DFR-Series
Compact Freeze Drying System DFM-Series
Lyophilized – Freeze Drying System DFB-Series
Vacuum Distillation
Distillation – Centrifugal Evaporation System CEH-Series
Analytical Equipment
UGMNI 200,300
Leak Testing
Automatic Leak Testing (ALT) and Helium Recovery Systems (HRS)
Other
By application
Advanced Packaging Device
Resist Strip System ENVIRO™ Optima
Architectural Glass
Automobile Parts
Automatic Leak Testing & Helium Recovery Systems
Roller-type Vacuum Heat Treatment Furnace FHHn-Series
Vacuum brazing furnace FB- & FBC-Series
Expanding Thermal Plasma CVD System ULGLAZE Series
Automotive
Automatic Leak Testing & Helium Recovery Systems
Batch-type Vacuum Heat Treatment Furnace FHB-60C
Aviation – Airplane Parts
Vertical-type Vacuum Heat Treatment Furnace FHV-Series
Air Conditioning and Refrigeration (ACR)
Automatic Leak Testing (ALT) and Helium Recovery Systems (HRS)
Decorative Coating
Evaporation Roll Coater EW-Series
Electronic Materials
EMI Shielding
Load-lock-type Sputtering System SDH-4550L
Food & Medicine
Food Processing
Health Care
Functional Materials
Display
LED Device
Dry Etching Tool APIOS NE-950EX
Batch-type High Vacuum Evaporation System ei-Series
Load-Lock-type High Vacuum Evaporation System CV-Series
Magnetic Device
Magnetic Multi-Layer System Magest S200
Magnet Materials
Vacuum Induction Melting Furnace FMI-Series
MEMS Device
UGMINI -200, 300
High-Density Plasma Etching System NE-550
Cluster-type Sputtering System SME-200
OLED
Organic EL Manufacturing Systems SOLCIET, SATELLA & NEW-ZELDA
Cluster-type PE-CVD System CME-Series
Optical Film
Dry Etching System for MEMS production NLD-5700
Load-lock-type Sputtering System CS-200
Pharmaceutical
Distillation – Centrifugal Evaporation System CEH-Series
Compact Freeze Drying System DFR-Series
Compact Freeze Drying System DFM-Series
Lyophilized – Freeze Drying System DFB-Series
Photovoltaic
Power Device
Medium Current Ion Implanter SOPHI-400
Activation Annealing System Ailesic-2000
Oxidation-Nitridization-Annealing System Ailesic 1400-1700
High-temp Ion Implanter for SiC IH-860PSIC
Medium Current Ion Implanter SOPHI-200/260
Dry Etching System for Production NE-5700 & NE-7800
Load-lock-type Plasma CVD System CC-200/400 PD
Back Side Metallization Sputtering System SRH-530 pd
R&D Equipment for Displays
Semiconductor Process (FEOL/BEOL)
A Batch System to Remove Native Oxide RISE-300
Advanced Plasma Resist Strip System ENVIRO-1Xa
Semiconductor Process (Non Volatile Memory)
Thin Film Deposition
Thin Film Battery
Organic / Inorganic Compound Deposition System VEP-Series
Touch Panel
Materials
Sputtering Targets
Sputtering Targets for Photovoltaic Applications
Sputtering Targets for Semiconductor Applications
Sputtering Targets for Flat Panel Display Applications
High Performance Materials
Wire/Bar [Ta] [Nb]
Sheet [Ta] [Nb]
Reactor Vessels [Ta] [Nb] [Zr]
Nano-metal Ink
Nano-metal Ink „Ag, L-Ag, Au, ITO series
Equipment by application
Advanced Packaging Device
Architectural Glass
Automobile Parts
Automotive
Aviation - Airplane Parts
Decorative Coating
Electronic Materials
EMI Shielding
Food & Medicine
Food Processing
Health Care
Functional Materials
Display
LED Device
Magnetic Device
Magnet Materials
MEMS Device
OLED
Optical Film
Pharmaceutical
Photovoltaic
Power Device
R&D Equipment for Displays
Semiconductor Process (FEOL/BEOL)
Semiconductor Process (Non Volatile Memory)
Thin Film Deposition
Thin Film Battery
Touch Panel
Air Conditioning and Refrigeration (ACR)