Eco Shock Series ES10

• ECO-SHOCK Contributes to Energy Savings
  Max.80% reduction of power consumption of dry pump. *1
  Effective in suppressing heat generation of dry pump resulting in reduction of air conditionaing costs.
  ECO-SHOCK runs with only 65 Watts of power and without N2 and cooling water.
  *Unusable when pumping flammable and toxic corrosives gases.
• Effective When Used with a Capacity Transfer Type of Dry Pump
  Excellent results when used with a multi-stage root type. *2
  Very effective when dry pump runs lower than 1000Pa.
• Overall Dry Pump Performance is Improved
  Improves ultimate pressure performance.
  Reduction in exhaust gas noise.
  No reduction in pumping speed in all pressure range.
• User-friendly
  Easy installation by attaching a valve unit to the exhaust pipe. *3

*1 A power consumption reduction rate changes with depending on pump model and gas volume, etc.
*2 ECO-SHOCK could not be used with certain claw root, screw type or shaft seal pumps, etc. Contact ULVAC for details.
*3 Modification could be required prior to installation of the ECO-SHOCK.

Contact your nearest ULVAC service center for installation.

SPECIAL FEATURES / FURTHER APPLICATIONS

• Power saving of dry pumps used as fore pumps of turbo molecular pump on sputtering and evaporation system.
• Power saving of dry pumps for load lock chambers.
• Power saving of dry pumps for vacuum laminator and vacuum packing, etc.