Thin Film Measurement / Deposition Controller
For precise thin film thickness measurement, ellipsometry is an optical method that offers valuable insights into the dielectric properties of thin films, including complex refractive index and dielectric function. Ellipsometry measures the altering of polarization upon reflection or transmission. UNECS Series is a Spectroscopic ellipsometer which measures thin film thickness and refraction index with high speed and high precision. The unique measurement method without rotational parts ensures high speed measurement and compact size. With ULVAC crystal oscillation deposition Contollers, the CRTM Series in combination with single-sensors or multi-sensors of the CRTS-Series and quartz crystals of the UCR-Series, we can provide all necessary parts for high proficiency deposition controlling which meet your requirements to the fullest.




