Ion Pumps by ULVAC
ULVAC’s PST-Serie is offering an exceptional selection of Sputter Ion pumps, if you are looking for a vacuum pump within the UHV or XHV-range. With its acter element and optimized magnet field you can improve your pumping speed capacity in extreme and ultra high vacuum range. PST Pump are availabe for different gas types such as active or rare gases. The adequate controller Controller GST-07L-B with high functionaliy and reliability is a result of ULVAC’s technological expertise and long time experience.
- Extremly high vacuum
- No wear and vibration
- Top-notch pumping characteristics
- Pumping speed: 0.36 m³/s
- Ultimate pressure: 10^-10 Pa
- Operating pressure: <8 x 10-³ Pa
- Pumping speed: 0.20 m³/s
- Ultimate pressure: 10^-10 Pa
- Operating pressure: <4 x 10-³ Pa
- Pumping speed: 0.10 m³/s
- Ultimate pressure: 10^-9 Pa
- Operating pressure: <5.0 x 10-³ Pa
- Pumping speed: 0.045 m³/s
- Ultimate pressure: 10^-9 Pa
- Operating pressure: <8 x 10-³ Pa
- Pumping speed: 0.03 m³/s
- Ultimate pressure: 10^-9 Pa
- Operating pressure: <8 x 10-³ Pa