- COMPONENTS
- Vacuum Pumps
- Dry Pumps
- Screw Type Dry Vacuum Pump LS Series 120A
- Screw Type Dry Vacuum Pump LS Series LS300A
- Screw Type Dry Vacuum Pump LS Series LS 600A
- Screw Type Dry Vacuum Pump LS Series LS 1200A
- Dry Vacuum Pump MS Series
- Scroll Type Dry Vacuum Pumps DIS Series
- Scroll Type Dry Vacuum Pumps DISL Series
- Diaphragm Type Dry Vacuum Pump DTC Series
- Diaphragm Type Dry Vacuum Pump DAU-20/DTU-20
- Diaphragm Type Dry Vacuum Pump DA Series
- Diaphragm Type Dry Vacuum Pump DAP Series
- Dry Vacuum Pump CR Series
- Dry Vacuum Pump LR/HR/UR Series
- Dry Vacuum Pump CR Series Version B
- Dry Vacuum Pump GR Series
- Rocking Piston Type Dry Vacuum Pumps DOP Series
- Oil Rotary Pumps
- Oil Sealed Rotary Vacuum Pump GHD-031
- Oil Sealed Rotary Vacuum Pump GLD Series
- Oil Rotary Vacuum Pump VD-Series
- Oil Rotary Vacuum Pump VD-Series 901
- Oil Rotary Vacuum Pump VS1501, VS2401
- Oil Rotary Vacuum Pump VS300A-W
- Oil Rotary Vacuum Pump VS650A
- Oil Rotary Vacuum Pump PKS Series
- Oil-sealed Rotary Vacuum Pump PVD Series
- Mechanical Booster Pumps
- Ion Pumps
- Turbo Molecular Pumps
- Oil Diffusion Pumps
- Cryo Pumps
- Accessories
- Dry Pumps
- Vacuum Gauges
- Multi Ionization Gauge G-TRAN Series ST200-A/R/E
- Multi Ionization Gauge G-TRAN Series SH200-A/R/E
- Pirani Vacuum Gauge Transducer Type SW100 SW100-A / R
- G-TRAN Series Pirani Gauge Sensor Unit SP1
- Smartphone-Direct Pirani Gauge SWU10-U
- Ceramic Capacitance Manometer, CCMT-D Series
- G-TRAN Series Pressure Switch Unit (SAU)
- Cold Cathode Gauge Sensor Unit G-Tran Series SC1
- G-TRAN ISG1
- Extreme High Vacuum Gauge AxTRAN
- Process Gas Monitor
- Basis Process Gas Monitor – Qulee BGM Series
- Compact Process Gas Monitor – Qulee CGM Series
- Compact Process Gas Monitor – Qulee CGM2 Series
- High Performance Process Gas Monitor – Qulee HGM Series
- Reactive Process Gas Monitoring System – Qulee RGM2 Series
- Qulee Series Option
- High Performance Process Gas Monitor – Qulee with YTP-H For Atmospheric Pressure
- High Performance Process Gas Monitor – Qulee with YTP-H Series for Vacuum
- Leak Detectors
- Thin Film Measurement / Deposition Controller
- Vacuum Valves
- Power Generator
- Thermo Electric Evaluation
- Vacuum Pumps
- Equipment
- By technology
- By application
- Advanced Packaging Device
- Automobile Parts
- Automotive
- Aviation – Airplane Parts
- Air Conditioning and Refrigeration (ACR)
- Food & Medicine
- LED Device
- Magnetic Device
- MEMS Device
- OLED
- Optical Film
- Power Device
- Medium Current Ion Implanter SOPHI-400
- Activation Annealing System Ailesic-2000
- Oxidation-Nitridization-Annealing System Ailesic 1400-1700
- High-temp Ion Implanter for SiC IH-860PSIC
- Medium Current Ion Implanter SOPHI-200/260
- Dry Etching System for Production NE-5700 & NE-7800
- Load-lock-type Plasma CVD System CC-200/400 PD
- Back Side Metallization Sputtering System SRH-530 pd
- Semiconductor Process (FEOL/BEOL)
Evaporation Roll Coater EW-Series
EW -Series models are deposition systems for evaporation of metal or oxides onto continuously-wound plastic film, paper or metal foil. Models range from compact types for research, to systems for mass-production. They can be used to manufacture products such as packaging materials, capacitors and magnetic tape.
- The substrate transfer system uses the latest winding control technology, ensuring stable transfer for every substrate material and size.
- Induction heating, resistance heating, and EB heating evaporation sources are available. The optimum source for the application can be selected.
- A wide range of pre- and post-process mechanisms are available to enable optimum process conditions.
- Film thickness monitors for online measurement are available (transmission film thickness monitor, eddy current film thickness monitor, resistance value monitor, others)
Special Features / Further Applications
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Packaging materials, transparent gas barriers, gold/silver thread
- Capacitors
- Magnetic tape
- Optical films
