Process Gas Monitor
Take a look at the different models of our ULVAC`s gas analyzers, which has earned an excellent reputation among many users.
- Excellent in Cost Performance
- Integrated Display
- Simple Operation
- Ideal for Sputtering System
- Degas Function
- Various Leak Tests are available
- Mass range 1-100 AMU
- Monitoring of residual hydrocarbons
- Various leak tests available (Helium leak test, air leak test, assembly test)
- Most Appropriate for R&D Applications
- Bake Out max 250˚C
- Total Pressure Measurement
- Unique Closed Ion Source with magnet enables
- Sensitive ionization chamber
- Reduces the distance from the process chamber to the ion source
- Excellent Cost Performance
- Easy to Operate
- Low noise
- Excellent Cost Performance
- Easy to Operate
- Low noise
