Rapid Thermal Processing (RTO) has become an important heating technique for annealing semiconductors, ferroelectrics and other thin film devices. But until recently, only large and expensive production systems were available for this rapid heating/cooling technique, making R&D work difficult to accomplish, especially on small samples. To address this need, ADVANCE RIKO has developed the MILA-5000 Mini Lamp Annealer. This compact table top RTP system is built around gold reflector IR furnace and contains a high precision temperature controller. When equipped with optional pumping gas inlet equipment the MILA-5000 is able to provide the same performance as larger production scale RTP units on small samples at a fraction of the size and cost.