Infrared Gold Image Furnace / RTA System
Meeting the needs of our customers with infrared lamp heating
Infrared Gold Image Furnaces are used in various fields for research and development or as production equipment. Infrared Gold Image Furnaces meet the customers‘ needs from high-speed heating to wide-area heating.
Special Features / Further Applications
Applications
- RTA of Si, compound semiconductors
- Atmosphere annealing furnace for metals
Features
- Ellipsoidal reflector enables high-speed heating to high temperatures
Specifications
| Model*1 | Heating Method | Max. Heating Temperature*2 |
Heating Length (Light Emission Length) |
Lamp Voltage | Input |
|---|---|---|---|---|---|
| E110L | Focused light single surface heating | – | 265mm | 200V | 2.0kW |
| E25N | Focused light cylindrical heating | 1100℃ | 140mm | 100V | 2.0kW |
| E25P | 1300℃ | 200V | 2.4kW | ||
| E45N | 1100℃ | 100V | 4.0kW | ||
| E45P | 1400℃ | 200V | 4.8kW | ||
| E410N | 1100℃ | 265mm | 200V | 4.0kW | |
| E410P | 1400℃ | 8.0kW | |||
| VHT-E44 | 1700℃ | 100mm | 200V | 8.0kW | |
| VHT-E64 | 12.0kW | ||||
| VHT-E48 | 1800℃ | 225mm | 480V | 24.0kW | |
| VHT-E68 | 36.0kW | ||||
| P44CP | Parallel light cylindrical heating | 1200℃ | 100mm | 100V | 4.0kW |
| P48CP | 200mm | 200V | 6.4kW | ||
| P410CP | 265mm | 8.0kW | |||
| P65CN | 900℃ | 140mm | 100V | 6.0kW | |
| P65CP | 1200℃ | 200V | 7.2kW | ||
| P610CN | 900℃ | 265mm | 6.0kW | ||
| P610CP | 1200℃ | 12.0kW | |||
| P810CN | 900℃ | 8.0kW | |||
| P810CP | 1100℃ | 16.0kW |
＊1 Model number meaning
For E410N
-
E : Reflecting surface type
-
E : Ellipsoidal reflection , P：Parabolodial reflection
-
4 : Lamp number
-
10 : Lamp length
-
N : Heating method, Lamp type
-
L : Linear focused light , C : Cylindrical heating , N : N lamp , P : P lamp
＊2 Maximum heating temperature changes according to the heated sample’s infrared reflectance, absorption, heat capacity, and material.
- Please be aware that heating furnaces require cooling water.
- Heating temperature changes according to the heated sample’s infrared reflectance, absorption, heat capacity, and material.
- For other specification requirements, please feel free to contact us.
Principles
- 1. Radiation heating
- The infrared gold image furnace is a radiation heating furnace that uses an infrared lamp with high energy density as heating source.
The furnace body is made of aluminum alloy with water cooled and the reflection surface of the infrared rays is polished and coated with gold which has a high reflection. - 2. Infrared lamp
- The tungsten filament is sealed in a quartz glass made tube, which the peak of the spectrum is approximately 1.15μm in the near infrared region.
The infrared lamp provide the energy density 10 to 15 times as high as the conventional heating element. - 3. Reflector
- The reflector is machined with high precision curvature to enhance the reflectance and inhabit the deterioration.
The reflector is available in two types due to its shape, one is elliptical type and the other is parabolic type. The model RHL-E and VHT-E series have a elliptical type reflector and is suitable for the heating of the rod shaped sample, and the other model: RHL-P,RHL-Ps and RHL-Pss series have a parabolic type reflector and is suitable for the sheet shaped sample.
