COLD CATHODE GAUGE SENSOR UNIT G-TRAN SERIES SC1
G-TRAN series SC1 is a magnetron type cold cathode vacuum gauge. Since no ilament is used, extended life between gauge replacements is assured. Maintenance is expected. Ease of maintenance reduces the cost of ownership.
- Transducer specification
When the pressure display is not required, the following advantages can be achieved:
Vacuum gauge cost is reduced because the display has been eliminated
Smaller size frees-up control panel space
Wiring is reduced - Maintenance
Maintenance is greatly simplyied - Filament is eliminated
No damage from exposure to atmospheric pressure - Control output signal
2 setpoint output - Output signal
Pressure reading is a 0 to 10V Log output (non-linear output) - Power supply voltage
Operated by DC24V
SPECIAL FEATURES / FURTHER APPLICATIONS
- Process control in the pressure range of precision vacuum equipment used for semiconductor, optics and electronic parts manufacturing
- Process control in low vacuum range for industrial equipment such as furnaces
- Process control in the pressure range for vacuum systems with multiple process chambers, such as in-line sputtering and single wafer processing equipment
