High-speed Spectroscopic Ellipsometer UNECS Series
UNECS series is a kind of spectroscopic ellipsometers to measure the refractive index and thickness of the thin film quickly and accurately. It adopts an unique measurement method, and realizes the compact size and high-speed measurement. It has a st rong products line, such as the por table type, the automatic stage type, and the built – in type etc.
- High-speed Measurement :
The snapshot measurement method is realized and the high-speed
measurement is 20ms per point.
- Visible Spectral Range :
The spectral wavelength range can be selected. The standard type is
530nm~750nm and the visible spectral type is 380nm~760nm.
- Compact Sensor Unit :
The sensor unit is light-weighted and very compact. It consists of
an optical element that does not have any rotating mechanism. In
addition, there is no need for any periodic maintenance.
- Strong Product-line :
There is a strong products line with the portable type, the manual/
automatic stage type, the built-in type and the large substrate type etc.
Special Features / Further Applications
- Measurement for transparent or semi-transparent thin films
thickness(D), reflective index(N) and extinction coefficient(K). (Oxide
film, nitride film, photo-resist film, ITO film, etc.)