- COMPONENTS
- Vacuum Pumps
- Dry Pumps
- Screw Type Dry Vacuum Pump LS Series 120A
- Screw Type Dry Vacuum Pump LS Series LS300A
- Screw Type Dry Vacuum Pump LS Series LS 600A
- Screw Type Dry Vacuum Pump LS Series LS 1200A
- Dry Vacuum Pump MS Series
- Scroll Type Dry Vacuum Pumps DIS Series
- Scroll Type Dry Vacuum Pumps DISL Series
- Diaphragm Type Dry Vacuum Pump DTC Series
- Diaphragm Type Dry Vacuum Pump DAU-20/DTU-20
- Diaphragm Type Dry Vacuum Pump DA Series
- Diaphragm Type Dry Vacuum Pump DAP Series
- Dry Vacuum Pump CR Series
- Dry Vacuum Pump LR/HR/UR Series
- Dry Vacuum Pump CR Series Version B
- Dry Vacuum Pump GR Series
- Rocking Piston Type Dry Vacuum Pumps DOP Series
- Oil Rotary Pumps
- Oil Sealed Rotary Vacuum Pump GHD-031
- Oil Sealed Rotary Vacuum Pump GLD Series
- Oil Rotary Vacuum Pump VD-Series
- Oil Rotary Vacuum Pump VD-Series 901
- Oil Rotary Vacuum Pump VS1501, VS2401
- Oil Rotary Vacuum Pump VS300A-W
- Oil Rotary Vacuum Pump VS650A
- Oil Rotary Vacuum Pump PKS Series
- Oil-sealed Rotary Vacuum Pump PVD Series
- Mechanical Booster Pumps
- Ion Pumps
- Turbo Molecular Pumps
- Oil Diffusion Pumps
- Cryo Pumps
- Accessories
- Dry Pumps
- Vacuum Gauges
- Multi Ionization Gauge G-TRAN Series ST200-A/R/E
- Multi Ionization Gauge G-TRAN Series SH200-A/R/E
- Pirani Vacuum Gauge Transducer Type SW100 SW100-A / R
- G-TRAN Series Pirani Gauge Sensor Unit SP1
- Smartphone-Direct Pirani Gauge SWU10-U
- Ceramic Capacitance Manometer, CCMT-D Series
- G-TRAN Series Pressure Switch Unit (SAU)
- Cold Cathode Gauge Sensor Unit G-Tran Series SC1
- G-TRAN ISG1
- Extreme High Vacuum Gauge AxTRAN
- Process Gas Monitor
- Basis Process Gas Monitor – Qulee BGM Series
- Compact Process Gas Monitor – Qulee CGM Series
- Compact Process Gas Monitor – Qulee CGM2 Series
- High Performance Process Gas Monitor – Qulee HGM Series
- Reactive Process Gas Monitoring System – Qulee RGM2 Series
- Qulee Series Option
- High Performance Process Gas Monitor – Qulee with YTP-H For Atmospheric Pressure
- High Performance Process Gas Monitor – Qulee with YTP-H Series for Vacuum
- Leak Detectors
- Thin Film Measurement / Deposition Controller
- Vacuum Valves
- Power Generator
- Thermo Electric Evaluation
- Vacuum Pumps
- Equipment
- By technology
- By application
- Advanced Packaging Device
- Automobile Parts
- Automotive
- Aviation – Airplane Parts
- Air Conditioning and Refrigeration (ACR)
- Food & Medicine
- LED Device
- Magnetic Device
- MEMS Device
- OLED
- Optical Film
- Power Device
- Medium Current Ion Implanter SOPHI-400
- Activation Annealing System Ailesic-2000
- Oxidation-Nitridization-Annealing System Ailesic 1400-1700
- High-temp Ion Implanter for SiC IH-860PSIC
- Medium Current Ion Implanter SOPHI-200/260
- Dry Etching System for Production NE-5700 & NE-7800
- Load-lock-type Plasma CVD System CC-200/400 PD
- Back Side Metallization Sputtering System SRH-530 pd
- Semiconductor Process (FEOL/BEOL)
Dry Vacuum Pump MS Series
MS Series is a vacuum pump which is categorized as screw type dry vacuum pump.
Corrosion resistance and powder exhaust are improved as process resistance model based on traditional LS Series. This model is designed for the process of using corrosion gas and powder exhausting.
- Corrosion resistance by treating special coating for main parts such as rotor shaft and cylinder
- High performance of powder exhausting by applying ULVAC’s unique design rotor shaft
- Realize continuous pumping near atmospheric pressure
SPECIAL FEATURES / FURTHER APPLICATIONS
- Vacuum system for semiconductor and electronic device manufacturing equipment
- Etching, Ashing, Plasma cleaning, etc.
- Vacuum system for furnace
- Sintering, Carburizing, etc.
- Vacuum system for Li-ion battery manufacturing equipment
- Electrode drying, Degassing, Vacuum injection, etc.
- Vacuum system for medical and food
- Freeze dry, Vacuum dry, etc.