Vacuum Valve Series
ULVAC, Inc.’s vacuum valve employs the vacuum technology of the vacuum specialized manufacturer accumulated through many years of experience. Please use ULVAC, Inc.’s vacuum valve, including L type valve and gate valve, which is compatible with all atmospheric pressure to ultra high vacuum ranges and conditions.
- Highly reliable
Designed to exhibit maximum exhaust rate of the vacuum pump having large conductance upon disk opening and less leak rate.
- Various lineups
Includes l (angle) type valve, gate type valve, variable leak type valve.
Applicable in all vacuum conditions from atmospheric pressure to ultra high vacuum.
Main body material types are SS (soft steel), stainless steel, aluminum.
Valves connection flange are vacuum flange, quick coupling flange, CF (UFC) flange and so on.
Disk seal materials are nitrile rubber, fluorine rubber, metal and polymide resin.
With theselineups, various proposals arae possible that matches with the customer needs.
- Two operating types
Manually driven and compressed air driven.
- Reverse pressure specification
100A or less are compatible as standard. (Revere pressure differential: within 0.1MPa)
compatibility 150A or more are compatible as option
- Baking out, customizing, and so on
- vacuum exhaust line for sputter apparatus and evaporation apparatus
- vacuum exhaust line for various heat processing furnace
- vacuum exhaust line for vacuum drying equipment and freeze-drying equipment
- vacuum exhaust line for leak tester
- vacuum exhaust line for various other vacuum equipment
VUH VUH-MVF 10-AIV VULP