Power Generator

ULVAC has a demonstrated history of developing and selling high-quality, dependable power generators, along with a wide range of other power supply solutions. With our extensive range of DC Power Supply, DC PULSE Power Supply, MF Power Supply, RF Power Supply, and EB Source/EB Power Supply, ULVAC offers the perfect solutions for sputtering systems. Our products have various features and can be used in various sectors and application such as FPD​, MEMS, Power Device, LED, Semiconductor, Hard disk, Industrial tools, Automobile​, Detoxifying​. Our DC power supplies line up ensure high versatility and reliability based on our knowhow including application. Pulsed DC power overcome high suppressing effect of abnormal discharge which are expected in reactive sputtering process. MF power supply are designed for dual cathode sputtering system. It is suitable for not only metal film deposition but also reactive deposition. Stable sputtering process can be realized without any anode loss. ULVAC’s EB power supply whose circuit was stabilzed and performace is improved based on long time accumulated technology. We have EB evaporation source which has long-life filament in our lineup as well. Any questions to slect the most suitable solution? Just contact our sales engineer will support you furthermore.