Screw Type Dry Vacuum Pump LS Series LS 600A

• High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced
• ECO-SHOCK technology realizes low power consumption. (C Type)
  Power consumption at the ultimate pressure is the industry-leading 0.6kW or less.(LS120A-C)
• Built-in silencer achieves the noise level 61dB(A) or less.
• Low running-cost
  No shaft sealing gas.
  ※Purge gas is available with L Type.
• 4 Pumping speed120~1200m3/h Class ※With mecanical booster pump
  Model is selectable with the optimum pumping speed according to the application.

FURTHER APPLICATIONS

C Type : Clean process (LS***A-C)
Feature : Low power consumption model (with built-in ECO-SHOCK)
Applications : For clean process such as air and N2
Sputtering / Vapor deposition / Lamination / Load lock room / TMP backing pump etc.

L Type : Light process (LS***A-L)
Features : Light process model (with surface treatment and purge function)
Applications : For light process such as steam and volatile liquid medicine
Vacuum drying / Freeze drying / Ashing / General industrial use etc.