Screw Type Dry Vacuum Pump LS Series LS 600A
High pumping speed and Low power consumption. Model is selectable with the optimum pumping speed according to the application.
- High pumping speed at near atmospheric pressure, and pumping down time can be drastically reduced
- ECO-SHOCK technology realizes low power consumption. (C Type)
Power consumption at the ultimate pressure is the industry-leading 0.6kW or less.(LS120A-C)
- Built-in silencer achieves the noise level 61dB(A) or less.
- Low running-cost
No shaft sealing gas.
※Purge gas is available with L Type.
- 4 Pumping speed120~1200m3/h Class ※With mecanical booster pump
Model is selectable with the optimum pumping speed according to the application.
C Type : Clean process (LS***A-C)
Feature : Low power consumption model (with built-in ECO-SHOCK)
Applications : For clean process such as air and N2
Sputtering / Vapor deposition / Lamination / Load lock room / TMP backing pump etc.
L Type : Light process (LS***A-L)
Features : Light process model (with surface treatment and purge function)
Applications : For light process such as steam and volatile liquid medicine
Vacuum drying / Freeze drying / Ashing / General industrial use etc.