Turbo Molecular Pump UTMｰMS Series
This is a turbomolecular pump with a separate controller that uses magnetic bearings.We have a lineup of models with pumping speeds of 300 to 4000 L/s. The controller unit can monitor the operating status and supports various communication standards.
- Separated pump body and controller
The controller can monitor the operating status and support various communication standards.
- Free mounting direction
Free mounting direction makes the system design flexible.
- Pumping speed 300L/s to 4000L/s class lineup
- Pump rotation variable from 25% to 100%
Enabling the pressure adjustment in a chamber by changing the rotation speed.
- High durability and safety
Safety confirmation tests are passed, such as air rushing-in test and touch down test.
Special Features / Further Applications
- Main vacuum pumping system for equipment
– Semiconductor equipmen
– Evaporator,Sputtering syste
– Analytical equipment,Experimental device and etc.
- Main vacuum pumping system for the light processes that do not generate side reaction products.
- General use for high vacuum evacuation system.