- COMPONENTS
- Vacuum Pumps
- Dry Pumps
- Screw Type Dry Vacuum Pump LS Series 120A
- Screw Type Dry Vacuum Pump LS Series LS300A
- Screw Type Dry Vacuum Pump LS Series LS 600A
- Screw Type Dry Vacuum Pump LS Series LS 1200A
- Dry Vacuum Pump MS Series
- Scroll Type Dry Vacuum Pumps DIS Series
- Scroll Type Dry Vacuum Pumps DISL Series
- Diaphragm Type Dry Vacuum Pump DTC Series
- Diaphragm Type Dry Vacuum Pump DAU-20/DTU-20
- Diaphragm Type Dry Vacuum Pump DA Series
- Diaphragm Type Dry Vacuum Pump DAP Series
- Dry Vacuum Pump CR Series
- Dry Vacuum Pump LR/HR/UR Series
- Dry Vacuum Pump CR Series Version B
- Dry Vacuum Pump GR Series
- Rocking Piston Type Dry Vacuum Pumps DOP Series
- Oil Rotary Pumps
- Oil Sealed Rotary Vacuum Pump GHD-031
- Oil Rotary Vacuum Pump Magnetic Coupling Series Gv135
- Oil Rotary Vacuum Pump Magnetic Coupling Series Gv200
- Oil Sealed Rotary Vacuum Pump GLD Series
- Oil Rotary Vacuum Pump VD-Series
- Oil Rotary Vacuum Pump VD-Series 90C
- Oil Rotary Vacuum Pump VS1501, VS2401
- Oil Rotary Vacuum Pump VS300A-W
- Oil Rotary Vacuum Pump VS650A
- Oil Rotary Vacuum Pump PKS Series
- Oil-sealed Rotary Vacuum Pump PVD Series
- Mechanical Booster Pumps
- Ion Pumps
- Turbo Molecular Pumps
- Oil Diffusion Pumps
- Cryo Pumps
- Accessories
- Dry Pumps
- Vacuum Gauges
- Multi Ionization Gauge G-TRAN Series ST200-A/R/E
- Multi Ionization Gauge G-TRAN Series SH200-A/R/E
- Pirani Vacuum Gauge Transducer Type SW100 SW100-A / R
- G-TRAN Series Pirani Gauge Sensor Unit SP1
- Smartphone-Direct Pirani Gauge SWU10-U
- Ceramic Capacitance Manometer, CCMT-D Series
- G-TRAN Series Pressure Switch Unit (SAU)
- Cold Cathode Gauge Sensor Unit G-Tran Series SC1
- G-TRAN ISG1
- Process Gas Monitor
- Basis Process Gas Monitor – Qulee BGM2-101/102-201/202 Series
- Compact Process Gas Monitor – Qulee CGM2 Series
- High Performance Process Gas Monitor – Qulee HGM2-202/302 Series
- Reactive Process Gas Monitoring System – Qulee RGM2 Series
- Qulee Series Option
- High Performance Process Gas Monitor – Qulee with YTP-H For Atmospheric Pressure
- High Performance Process Gas Monitor – Qulee with YTP-H Series for Vacuum
- Leak Detectors
- Thin Film Measurement / Deposition Controller
- Vacuum Valves
- Power Generator
- ECO Shock Series ES10
- ECO Shock Series ES4A
- DC Power generator DC-10/DC-20 and DC-30-44H
- Pulsed and DC power supply systems DC PULSE power supply
- Pulsed and DC power supply systems DC power supply Model Digital DC-2-4-D
- Pulsed and DC power supply systems DC power supply Model Digital DC-10-20-D
- RF Power System Built-in matcher RMG-1303
- RF Power System RF power supply RFS-N
- Thermo Electric Evaluation
- Vacuum Pumps
- Equipment
- By technology
- By application
ENTRON-EXX – PVD Solutions
The Entron-EXX multi-chamber sputtering system is specifically for the 300mm Silicon Semiconductor market. Entron system is equipped with the latest process chambers for advanced 300mm processing
- Single to Tandem Core Platform
- High Performance
- High Reliability
- High Flexibiliy
FURTHER APPLICATIONS
- Flexible module configuration
- System can run both PVD and CVD/ALD process
- Many applications including: (NVM, Al & Cu wiring, TI/TiN barrier metal, thick AL and Co/Ni salicide etc.)
- Process capability for not only Si devices but also compound semiconductor
- 10 process modules maximum
- Single or Tandem platforms are available
- High Throughput system with great reliability
- Highly reliable Rorze EFEM used for atmospheric transfer
- Equipped with the latest control system that complies with the next generation semiconductor Fab
- Semi Compliant
