DC Power Generator DC-10/DC-20 and DC-30-44H
The “Model:DC” is a direct current power supply (DC power supply) for sputtering. It is composed of reliable components and circuits. It is a highly reliable power supply that is ideal for plasma loads by reflecting the know-how we have cultivated over many years, including the application of power supplies, in the design.
- Lightweight and space-saving design
- Lineup of 800V and 1000V output voltage ranges (10/20kW products only)
- Output control with a thorough knowledge of plasma
- Forced air cooling system does not require cooling water
- Equipped with excellent ARC function and high-speed ARC cut-off circuit
- Equipped with excellent ARC function and high-speed ARC cutoff circuit
- Up to 12 units (240kW) can be operated in parallel (10/20kW products only)
- Compliant with CE, SEMI F47 and RoHS (excluding DCS and 400V specifications)
SPECIAL FEATURES / FURTHER APPLICATIONS
| Model | DC-10-AM | DC-10-H-AM | DC-10-4-AM | DC-20-AM | DC-20-H-AM | DC-20-4-AM | DC-30-44H | |
| Input Specifications | Input voltage | 3-phase AC208V | 3-phase AC380-400V |
3-phase AC208V | 3-phase AC380-400V |
3-phase AC440V |
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| Input Capacity | 13.5kVA or less | 25kVA or less | 41.5 kVA or less |
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| Output Specifications | Rated power | 10kW | 20kW | 30kW | ||||
| Ratedcurrent | 25A | 18A | 25A | 50A | 40A | 50A | 55A | |
| Rated voltage | 800V | 1000V | 800V | 800V | 1000V | 800V | 1200V | |
| Ignition voltage | 1500V | |||||||
| control | Control accuracy | The higher of ±0.5% or less of the rated output or ±1% of the set value | ||||||
| Control Warranty Coverage | 10-100% of rated power value | |||||||
| Interface | Analog/Digital, Serial communication（RS232C or RS485） | SERIAL control (RS232C or RS485) /EtherCAT |
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| Parallel operation | Yes | |||||||
| Cooling method | Forced air cooling | |||||||
| Dimensions (W×D×H) does not contain protrusions | 483×630×133（mm） | 483×650×177（mm） | ||||||
| Weight | 29kg | 36kg | 45kg | |||||
| Standard | CE, KC, SEMI F47, RoHS（Europe） | RoHS （Europe） |
CE, KC, SEMI F47, RoHS（Europe） | RoHS （Europe） |
CE, SEMI F47, RoHS（Europe） | |||
