Pulsed and DC power supply systems
DC power supply Model: Digital DC-10-20-D
High-Performance DC Power Supply Continually Evolving with New Features for Process Optimization
The Digital “Model: DC” is a DC power supply for sputtering. It is composed of reliable components and circuits. It is a highly reliable power supply that is ideal for plasma loads by reflecting the know-how we have cultivated over many years, including the application of power supplies, in the design.
- A wide range of advanced options
- Lightweight and space-saving design
- Lineup includes 800V and HV specifications for output voltage range (10/20kw: 1000V / 2/4kw: 900V)
- Output control with a thorough understanding of plasma
- Forced air cooling system eliminates the need for cooling water
- Equipped with excellent ARC function and high-speed ARC cut-off circuit
- Up to 12 units (240 kW) can be operated in parallel（10/20kW products only）
- Compliant with CE, KC, SEMI F47, RoHS
SPECIAL FEATURES / FURTHER APPLICATIONS
| Model | DC-10-D | DC-10-DH | DC-20-D | DC-20-DH | |
| Input Specifications | Input voltage | 3-phase AC208V | |||
| Input Capacity | 13.5kVA or less | 25kVA or less | |||
| Output Specifications | Rated power | 10kW | 20kW | ||
| Ratedcurrent | 25A | 18A | 50A | 40A | |
| Rated voltage | 800V | 1000V | 800V | 1000V | |
| Ignition voltage | 1500V | ||||
| control | Control accuracy | The higher of ±0.5% or less of the rated output or ±1% of the set value High accuracy options are also available |
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| Control Warranty Coverage | 10-100% of rated power value High accuracy options are also available |
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| Interface | Analog/Digital, Serial communication（RS232C or RS485）, EtherCAT（Option） | ||||
| Parallel operation | Yes | ||||
| Cooling method | Forced air cooling | ||||
| Dimensions(W×D×H) does not contain protrusions | 483×630×133（mm） | ||||
| Weight | 29kg | 36kg | |||
| Standard | CE, KC, SEMI F47, RoHS（Europe） | ||||
