ULVAC wins order from NexPower Technology Corporation for complete Solar Cell manufacturing plant to be built in Taiwan

2007-03-23 10:20

Deal will include all manufacturing peripheral equipment and production training

Bosch, as a world leading MEMS sensor manufacturer, selected ULVAC’ｓ SME-200 sputtering system for the development of upcoming leading edge MEMS. With the growth of MEMS technology, sensors and actuators that use piezoelectric device have been developed and commercialized in recent years. ULVAC believe that MEMS manufacturing technology, such as thin-film deposition and dry etching will be the key factor in producing high quality piezoelectric device in years to come.