ULVAC, Inc. and Robert Bosch GmbH Sign Basic Agreement for Joint Development of Piezoelectric Device (PZT) for MEMS -Sputtering Solution-
ULVAC, Inc. (ULVAC)(Headquartered in Kanagawa, Japan and lead by CEO Hisaharu Obinata) and Robert Bosch GmbH (Bosch)(Headquartered in Gerlingen, Germany and lead by CEO Volkmar Denner) today announced they have signed a basic agreement to jointly develop piezoelectric device (PZT) for MEMS.
Bosch, as a world leading MEMS sensor manufacturer, selected ULVAC’ｓ SME-200 sputtering system for the development of upcoming leading edge MEMS.
With the growth of MEMS technology, sensors and actuators that use piezoelectric device have been developed and commercialized in recent years. ULVAC believe that MEMS manufacturing technology, such as thin-film deposition and dry etching will be the key factor in producing high quality piezoelectric device in years to come.