Titanium Getter Pump GGT-3, PGT Series
Titanium getter pumps (GGT-3 / PGT series) pass current directly through titanium alloy placed in a vacuum chamber in order to sublimate the titanium. The sublimated titanium creates a large active metallic surface on the surrounding walls for absorbing and removing chemically active gases (H2, N2, O2, H2O, CO, CO2).Since an active metallic surface made of titanium does not absorb inactive gases (He, Ne, Ar, CH4, C2H6, and other organic gases), these units are used in combination with such equipment as sputter ion pumps and turbo molecular pumps.
- High pumping speed near atmospheric pressure drastically reduces pump down time.
- Built-in ECO-SHOCK technology reduces power consumption significantly for clean applications.
- Built-in silencer achieves a noise level of 61dB(A) or less
- Low Running-Cost
- Available in 4 models with pumping speeds betweenn 120~1200m3/h
SPECIAL FEATURES / FURTHER APPLICATIONS
Clean Process („C-Type“): For clean processes involving gasses like Air and N2 (LS***A-C)
- TMP backing pump etc.
- Load lock room
- Vapor deposition
Light Process („L-Type“): For light processes involving steam and other difficult gases (LS***A-L)
- General industrial use
- Freeze drying
- Vacuum drying