Atmospheric Pirani Gauge Combo SW1 & ISG1
This is a wide range pirani gauge which measures from atmospheric pressure to 5×10-2 Pa (3.75×10-4 Torr, 5×10-4 mbar) Platinum wire is used for filaments , therefore, the filament will function even at atmospheric pressure.
- Wide-range Measurement
Measures from atmospheric pressure to 5×10-2 Pa (3.75×10-4 Torr, 5×10-4 mbar) - Power Supply Voltage
Powered with 24VDC or 100VAC to 240VAC input - Shock Resistant
Design is highly resistant to shock - Filament Material: platinum (Pt)
Corrosion-resistant platinum is used as the filament material - High Visibility LEDs Used for Error Display
- One-touch Adjustment
Atmospheric adjustment and the zero point adjustment can be done with one-touch - Maintainability
Sensor head can be replaced easily - Measured Value Output Signal
Pressure is 0 to 10V Log output - Control Output Signal
3 set point output - Serial Communication Spec
RS485 communication (ISG1) - Display Unit
With visble LED - Certification
Conforms with CE
SPECIAL FEATURES / FURTHER APPLICATIONS
- Process control in low vacuum range of vacuum equipment such as that used for semiconductor, optics and Photovoltaic field, FPD, electronic parts manufacturing
- Process control in the low vacuum range for industrial equipment such as vacuum furnaces, etc.
- Process control in low pressure range for vacuum systems with multiple process chambers such as in-line sputtering and single wafer processing equipment
- For pumping unit (system) which it has a vibration and/or shach in the manufacture process
