ULVAC Crystal Oscillation type Deposition Controller have been developed based on rich experience and technology as a device manufacturer. It is possible to use from the single layer film to the multilayer film for a wide deposition control. ULVAC deposition controllers of the CRTM-Series ensure low rate deposition and high precision film thickness control with an outstanding film thickness/rate resolution. The high speed sampling ratre makes the control highly reponsive. Sensors of the CRTS-Series can be chosen from single-sensors or multi-sensors. Furthermore, the selection depends on deposition condition such as with or without baking, temperature range, etc.. ULVAC’s quartz crystals ensure the smallest frequency change due to radiant heat. ULVAC developped the world-first high performance 4MHz quartz crystal specialzed for organic material film. UCR comes in a carousel type case with 10 pieces/pack for an easy and saftey package. ULVAC is always striving for innovation as a result of long time experience. Just have a look at our latest new product introduction, the CRTM-R1 deposition controller.
- Excellent rate stability and resolution
- Ability value (CI value) measurement function
- Simultaneous vapor deposition control of up to 8 sources
- Two sensors can be switched for deposition control
- Up to 99 deposition programs
- Low rate deposition process control