Turbo-Molekularpumpe
Modell: UTM-MI
Die im Controller integrierte Turbomolekularpumpe mit Magnetlagern spart Verkabelungsaufwand und Bauraum.
Merkmale
- Im Pumpenkörper integrierter Controller Keine Verkabelungsarbeiten zwischen Pumpenkörper und Steuerung.
- Freie Montagerichtung Die freie Montagerichtung macht das Systemdesign flexibel.
- Große Reichweite und hoher Durchfluss für die Lichtprozesse.
- Pumpenrotation variabel von 25 % bis 100 % Ermöglicht die Druckanpassung in einer Kammer durch Änderung der Rotationsgeschwindigkeit.
- Hohe Haltbarkeit und Sicherheit Sicherheitsbestätigungstests wie der Lufteinströmtest und der Aufsetztest werden bestanden.
Anwendungen
- Hauptvakuumpumpsystem für Geräte
– Halbleiterausrüstung
– Verdampfer, Sputtersystem
– Analysegeräte, Versuchsgeräte usw.
- Hauptvakuumpumpsystem für leichte Prozesse, bei denen keine Nebenreaktionsprodukte entstehen.
- Ersatz von Öldiffusionspumpen
- Allgemeine Verwendung für Hochvakuum-Evakuierungssysteme.
Specifications
| Model | UTM1200A | UTM1600A | UTM2300A | UTM3400A | ||||||||
| Inlet port | VG 150 |
ISO 160F |
VG 200 |
VG 250 |
ISO 200F |
ISO 250F |
VG 250 |
ISO 250F |
VG 300 |
VG 350 |
ISO 320F |
|
| Outlet port | KF40 | |||||||||||
| Ultimate pressure *1 |
10-7 Pa | |||||||||||
| Pumping speed *2*3 |
N2 | 1030 L/s | 1400 L/s | 2100 L/s | 3200 L/s | |||||||
| Ar | 980 L/s | 1330 L/s | 2000 L/s | 3100 L/s | ||||||||
| H2 | 660 L/s | 750 L/s | 1380 L/s | 2100 L/s | ||||||||
| Comp ression rate |
N2 | 2×108 | ≧ 1×108 | ≧ 1×109 | ||||||||
| He | 7×103 | 5×103 | 1×105 | |||||||||
| H2 | 8×102 | 9×102 | 6×103 | |||||||||
| Max inlet pressure *4 |
26 Pa | 4.5 Pa | 7 Pa | |||||||||
| Max outlet pressure *4 |
266 Pa | 200 Pa | 270 Pa | |||||||||
| Rotation speed | 37200 min-1 | 33700 min-1 | 27600 min-1 | |||||||||
| Speed variation | Speed is variable between 25% and 100% of the rated speed.（ set as 0.1%） | |||||||||||
| Start-up time | ≦ 8minutes | ≦ 9minutes | ≦ 16minutes | |||||||||
| Mounting position |
In any desired direction | |||||||||||
| Surface treatment *5 |
None | |||||||||||
| Commun ication |
Contact | D-sub 25 pin female Contact input and output signal | D-sub 37 pin female Contact input and output signal | |||||||||
| Serial | Serial connecter RS232C/RS485 | D-sub 9 pin male RS232C/RS485 | ||||||||||
| Controller | Compo sition |
Pump with integrated controller | ||||||||||
| Input electric power |
Single phase AC200 〜240V ±10%（ 50/60Hz ±2Hz） | |||||||||||
| Max power |
0.75kVA | 1.2kVA | ||||||||||
| Cooling method | Water cooled | |||||||||||
| Cooling water *6 |
Flow rate |
3 – 4 L/min | ||||||||||
| Pressure | 0.2 – 0.4M PaG | |||||||||||
| Noise | 57 dB(A) | 60 dB(A) | ||||||||||
| Weight | 43 kg | 41 kg | 56 kg | 94 kg | ||||||||
| Recommended backing pump *7 |
≧ 600L/min | ≧ 1500L/min | ||||||||||
| Applicable standard | CE, TUVus | |||||||||||
| Standard accessories | O-ring(Only VG), Dust cap(Outlet port), Remote-control Connector, Instruction manual(CD-ROM) | |||||||||||
| Select parts |
AC Cable | AC Conector / AC Cable(5m/10m/15m/20m) | ||||||||||
| Special bolt for fixing pump |
M10/ M12 | |||||||||||
| Special bolt for fixing pump |
Need（M10) *8 | Not Need *8 | ||||||||||
| Option | Gas purge adaptor (KF10) | |||||||||||
*1 digit number is expressed.
*2 Without a protective net.
*3 Calculated values : UTM2300A and UTM3400A
*4 Max inlet pressure and Max outlet pressure cannot be satisfied at same time.
*5 Do not flow reactive gas and corrosive gas. Please contact us when using other gases.
*6 Not condensing
*7 When evacuating 30SCCM
*8 Grade of bolts,Fixing method and etc. are subject to various conditions. Please contact
us for the detailed information.
Dimension drawing
- Dimensions
(mm)
| A | B | C | D | E | ||
| UTM1200A | VG150 | 235 | 439 | 218 | – | 285 |
| ISO160F | 225 | 442 | 218 | – | 285 | |
| UTM1600A | VG200 | 300 | 374 | 218 | – | 285 |
| ISO200F | 285 | 374 | 218 | – | 285 | |
| VG250 | 350 | 374 | 218 | – | 285 | |
| ISO250F | 335 | 374 | 218 | – | 285 | |
| UTM2300A | VG250 | 350 | 376 | 233 | 245 | 310 |
| ISO250F | 335 | 376 | 233 | 245 | 310 | |
| UTM3400A | VG300 | 400 | 462 | 233 | 245 | 360 |
| VG350 | 450 | 462 | 233 | 245 | 360 | |
| ISO320F | 425 | 467 | 233 | 245 | 360 | |
Note)The position and phase of outlet, gas purge port,
cooling water valve and cooling water valve connector are different to types.
